CAMPBELL Eric J.,CZAPLEWSKI Sarah K.,KUCZYNSKI Joseph,TOFIL Timothy J.
申请号：
US201715833467
公开号：
US2018095038(A1)
申请日:
2017.12.06
申请国别(地区):
美国
年份:
2018
代理人:
摘要：
Method and apparatus for determining a quality or characteristic of connectors in electronic components is provided. Methods include applying a UV-responsive indicator solution active for Pd, Ni, or Cu to a connector on an electrical component; irradiating the connector with UV radiation; detecting a response to the UV radiation; and determining a quality of the connector based on the response to the UV radiation. Apparatus includes an enclosure; a support; a dispenser oriented toward the substrate support; a source of UV-responsive indicator solution active for Pd, Ni, or Cu ions fluidly coupled to the dispenser; a UV source coupled to the enclosure; and a radiation sensor positioned to detect light inside the enclosure.
