PROBLEM TO BE SOLVED: To provide a charged particle beam irradiation device able to manage, with a simple configuration, the amount of inert gas supplied to a cylinder.SOLUTION: This charged particle beam irradiation device 1 comprises: a cyclotron 3 which accelerates charged particles and emits a charged particle beam P a vacuum duct 7 which transports the charged particle beam P emitted from the cyclotron 3 to an irradiation nozzle 5 an extension duct 10 which is disposed inside the irradiation nozzle 5 on the propagation path of the charged particle beam, has an interior filled with inert gas, and is provided with Kapton films 13, 14 at an inlet and an outlet, the Kapton films transmitting the charged particle beam P a gas supply part 20 which supplies helium gas to the interior of the extension duct 10 a scanning magnet 12 which is disposed around the extension duct 10 and scans the charged particle beam P and a leak valve 36 which leaks helium gas in the extension duct 10 to the outside when the internal pressure of the extension duct 10 is greater than or equal to a set pressure. The gas supply part 20 has supply lines A-C having different amounts of helium gas supply.COPYRIGHT: (C)2013,JPO&INPIT【課題】簡素な構成で筒体に対する不活性ガスの供給量を管理することができる荷電粒子線照射装置を提供する。【解決手段】本発明の荷電粒子線照射装置1は、荷電粒子を加速して荷電粒子線Pを出射するサイクロトロン3と、サイクロトロン3から出射された荷電粒子線Pを照射ノズル5へ輸送する真空ダクト7と、照射ノズル5内で荷電粒子線の進路上に配置され、内部に不活性ガスが充填されると共に、荷電粒子線Pを透過させるカプトンフィルム13,14を入口及び出口に有する延長ダクト10と、延長ダクト10内にヘリウムガスを供給するガス供給部20と、延長ダクト10の周囲に配置され、荷電粒子線Pを走査する走査磁石12と、延長ダクト10の内部圧力が設定圧以上のときに延長ダクト10内のヘリウムガスを外部にリークするリーク弁36と、を備え、ガス供給部20は、ヘリウムガスの供給量が各々異なる供給ラインA~Cを有する。【選択図】図2