Device And Method For Line Control Of An Energy Beam

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专利权人:

Jean-Marc Fontbonne

发明人:

Jean-Marc Fontbonne,Jérôme Perronnel,Bruno Marchand,Caterina Brusasco

申请号：

US13499634

公开号：

US20120310030A1

申请日:

2010.09.30

申请国别(地区):

US

年份:

2012

代理人:

摘要：

The invention relates to the field of line control of a beam, and especially to a device comprising a plurality of ionisation chambers, enabling the measurement of the dose deposited by an ionising beam and the field of said beam. At least one ionisation chamber is formed from support films having a thickness less than or equal to 100 nm.

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