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Method and Device for Three-Dimensional Confocal Measurement
专利权人:
Matus Banyay
发明人:
Matus Banyay,Frank Thiel
申请号:
US14343495
公开号:
US20140313524A1
申请日:
2012.09.10
申请国别(地区):
US
年份:
2014
代理人:
摘要:
The invention relates to a method and a device (20) for three-dimensional measurement of an object (6) using a confocal microscopy method comprising a laser source (21) for generating an illumination beam (3), a focusing optics (4) for focusing the illumination beam (3) on at least one measuring point (5, 23) on a surface of the object (6) to be measured, a detector (10) for detecting an observation beam (9) reflected by the surface of the object (6), a confocal observation optics (7), which allows only the observation beam (9) that is focused on the surface of the object (6) to pass through to the detector (10). The laser source (21) comprises multiple coherent laser elements (22), the laser elements (22) simultaneously emitting illumination beams (3) that are focused on multiple measuring points (5, 23) on the surface of the object (6), so that the laser elements (22) are arranged to reduce the speckle effect in the 3D-image data generated by the measurement.
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