PROBLEM TO BE SOLVED: To provide a grid including an X-ray absorption part having a high aspect ratio.SOLUTION: An X-ray transmissive substrate 30 is etched to form: a plurality of grooves 28 extended in y-direction and arranged in x-direction orthogonal to the y-direction a plurality of X-ray transmitting sections 25 separating the respective grooves 28 and a plurality of supporting portions 27 projected in the x-direction from side faces of the X-ray transmitting sections 25, and arranged in the grooves 28. The supporting portions 27 are alternately formed on both the side faces of each X-ray transmitting sections 25 along the y-direction. The supporting portions 27 support the X-ray transmitting sections 25 when an X-ray absorbing material is filled in the grooves 28 by electroplating, and prevent that the X-ray transmitting sections 25 fall by rock of a plating liquid or nonuniform growth of the X-ray absorbing material.COPYRIGHT: (C)2012,JPO&INPIT【課題】アスペクト比の高いX線吸収部を有するグリッドを提供する。【解決手段】X線透過性基板30にエッチングを行ない、y方向に延伸されかつy方向に直交するx方向に沿って配列された複数の溝28と、各溝28の間を隔てる複数のX線透過部25と、X線透過部25の側面からx方向に突出されて溝28内に配置された複数の支持部27とを形成する。支持部27は、X線透過部25の両側面に、y方向に沿って交互に設けられている。支持部27は、溝28内に電解メッキによってX線吸収材が充填される際にX線透過部25を支持し、X線透過部25がメッキ液の揺動やX線吸収材の不均一成長によって倒れるのを防止する。【選択図】図4
