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Ultrasonic transducer element, method of manufacturing the same, and ultrasonic image pickup device
专利权人:
HITACHI; LTD.
发明人:
Hiroaki Hasegawa,Taiichi Takezaki,Shuntaro Machida,Daisuke Ryuzaki
申请号:
US15579383
公开号:
US10610890B2
申请日:
2015.06.04
申请国别(地区):
US
年份:
2020
代理人:
摘要:
An ultrasonic transducer element includes a substrate, a lower electrode on a first surface of the substrate, a first insulating film on the lower electrode, a first cavity layer on the first insulating film, a second insulating film on the first cavity layer, an upper electrode on the second insulating film that overlaps the first cavity layer, a third insulating film on the upper electrode, a second cavity layer on the third insulating film, a fourth insulating film on the second cavity layer, a fixing portion formed by the second to fourth insulating films, a movable portion in a membrane insides the second cavity layer, a first connection portion and a second connection portion that are stacked with a gap and the connection portions are configured by the second to fourth insulating films connecting the movable portion and the fixing portion.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/
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