The present application provides a method for the preparation of siloxaneoligomers or polymers essentially without the attendant co-generation ofcyclic siliconeoligomers by the addition of water, alcohols or alkoxysilanes tohydridosiloxanes in thepresence of a Lewis acid, of which B(C6F5)3 is particularly suitable example.The mild andselective reaction permits the preparation of small linear and branchedsiloxane oligomersor polymers. Silicone oligomers provide alternatives to cyclomethicones inpersonal careapplications.