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A METHOD OF MANUFACTURING AN ULTRASOUND TRANSDUCER FOR USE IN AN ULTRASOUND IMAGING DEVICE, AND AN ULTRASOUND TRANSDUCER AND ULTRASOUND PROBE MANUFACTURED ACCORDING TO THE METHOD.
专利权人:
OLDELFT B.V.
发明人:
PRINS CHRISTIAN,PONTE JACOB ALEXANDER,YU ZILI
申请号:
NL2008459
公开号:
NL2008459C2
申请日:
2012.03.09
申请国别(地区):
NL
年份:
2013
代理人:
摘要:
The invention relates to a method of manufacturing an ultrasound transducer (13) for use in an ultrasound imaging device (10), an ultrasound transducer manufactured according to the method and an ultrasound probe comprising at least one ultrasound transducer manufactured according to the method. The method comprises the steps of providing a carrier (51)of semi-conductor material comprising a two dimensional array of conductive pads (52), wherein the carrier of semi-conductor material comprises electronic circuitry connected with the conductive pads for further processing outside said ultrasound transducer. Next on the carrier a layer comprising piezo electrical material (58) is provided and it covers the two dimensional array of conductive pads. Then each of the plurality of transducer elements is separated by dicing the two dimensional array on the carrier. Finally a grounding layer (61) is provided on the plurality of transducer elements for grounding each transducer element. Between the carrier and the layer comprising the piezo electrical material however there is a buffer layer (57) provided which has a thickness arranged for dicing each of the plurality of transducer elements on the carrier.
来源网站:
中国工程科技知识中心
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http://www.ckcest.cn/home/

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