HITACHI MEDICAL CORPORATION; LTD.;HITACHI, LTD.;HITACHI
发明人:
TANAKA, HIROKI,AZUMA, TAKASHI,FUKUDA, HIROSHI
申请号：
EP06782183
公开号：
EP1950997A4
申请日:
2006.08.02
申请国别(地区):
EP
年份:
2016
代理人:
摘要：
An ultrasonic transducer (100) includes a substrate (1) having a first electrode therein or on a surface thereof and a diaphragm (5) having a second electrode therein or on a surface thereof, with a cavity (4) therebetween. Further, at least one beam (7) is provided on a surface or inside of the diaphragm (5) or the second electrode.
