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Method of manufacturing a sensor for sensing analytes
专利权人:
Sano Intelligence; Inc.
发明人:
Ashwin Pushpala,Alan Szmodis,Matthew Chapman,Weldon Hall,Scott Miller,Hooman Hafezi
申请号:
US14211404
公开号:
US09182368B2
申请日:
2014.03.14
申请国别(地区):
US
年份:
2015
代理人:
摘要:
A method of manufacturing a sensor for sensing analytes, the method including: with a dicing saw, removing material from a substrate, thereby forming an array of columnar protrusions at a first surface of the substrate; forming an insulating layer coupled to exposed surfaces of the substrate and exposed surfaces of the array of columnar protrusions; removing a portion of the insulating layer at a second surface of the substrate, directly opposed to the first surface of the substrate; with the dicing saw, removing material from a distal end of each columnar protrusion in the array of columnar protrusions, thereby defining a sharp tip, uncovered by the insulating layer, at the distal end of each columnar protrusion in the array of columnar protrusions; and coupling a conductive layer to the sharp tip of each columnar protrusion in the array of columnar protrusions.
来源网站:
中国工程科技知识中心
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