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SURFACE TOPOGRAPHY APPARATUS AND METHOD
专利权人:
Zygo Corporation
发明人:
de Groot Peter J.,Deck Leslie L.
申请号:
US201815884951
公开号:
US2018180412(A1)
申请日:
2018.01.31
申请国别(地区):
美国
年份:
2018
代理人:
摘要:
An optical method for determining an orientation of surface texture of a mechanical part includes: i) acquiring data for a first areal surface topography image using a surface topography measurement instrument, wherein the first image corresponds to a first field of view of the mechanical part for the surface topography measurement instrument; ii) rotating the mechanical part with respect to a rotation axis provided by a rotatable mount used to secure the mechanical part to provide a second field of view of the mechanical part for the surface topography measurement instrument, wherein the first and second fields of view overlap to provide image information about a common region of the mechanical part; iii) acquiring data for a second areal surface topography image using the surface topography measurement instrument, wherein the second image corresponds to the second field of view; and iv) processing the data from the images.
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中国工程科技知识中心
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