A MEMS check valve chip is described. The chip comprises a first side and an opposing second side, an outlet port extending from the first side to the second side, and a flexible outlet membrane anchored to the first side to overlie the outlet port. The flexible outlet membrane includes an outlet aperture and a sealing portion, and the sealing portion is movable between a closed position inhibiting fluid flow through the outlet aperture and an open position wherein the sealing portion displaces into the outlet port to permit fluid flow through the outlet aperture.
