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OPTICAL PROBES WITH CORRECTION COMPONENTS FOR ASTIGMATISM CORRECTION
专利权人:
Canon U.S.A.; Inc.
发明人:
Tzu-Yu Wu
申请号:
US15879269
公开号:
US20190223699A1
申请日:
2018.01.24
申请国别(地区):
US
年份:
2019
代理人:
摘要:
An optical probe comprises a light-guiding component, an optical component, a light-reflecting component that is configured to receive light from the optical component and direct the light along a path, and a correction component. The correction component lies in the path, the correction component has an optical power, and the correction component has a center of curvature that substantially coincides with an optical axis of the optical component.
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