PURPOSE: A target structure for generating charged particle beam, a manufacturing method thereof, a medical appliance using the same are provided to improve the structural stability of a thin target layer.CONSTITUTION: A target structure comprises a target layer(150) and support body(100). The target layer is equipped with a first surface to which a laser beam is irradiated and a second surface from which a charged particle beam is emitted. The support body has a penetration hole(200) which is used as a travel route of the laser beam or the charged particle beam. The support body is selected from silicon, sapphire, diamond, quartz, glass, a ceramic material, or a metal material.COPYRIGHT KIPO 2012하전입자빔 생성에 사용되는 타겟 구조체, 그 제조 방법 및 이를 이용한 의료 기구가 제공된다. 이 타겟 구조체는 타겟층, 그리고 레이저 빔 또는 하전입자 빔의 진행 경로로 사용되는 관통홀을 갖는 지지체를 포함한다.