PROBLEM TO BE SOLVED: To highly accurately perform measurement in an optical type inner surface measuring apparatus for performing observation and measuring accuracy by inserting a probe into an inner peripheral surface or a deep hole inner diameter of a measuring object and three-dimensionally taking in light beams reflected by the inner surface.SOLUTION: The optical type inner surface measuring apparatus includes: an optical fiber included in a tube optical path conversion means disposed at a distal side of the optical fiber a motor for rotatingly driving the optical path conversion means and means for measuring an amount of runout of a rotary shaft of the motor. Shape data on an inner peripheral surface of a test object obtained by calculating the reflection light from the test object by a computer is corrected by displacement data on displacement measuring means to eliminate a measurement error caused by runout and rotary oscillation of the rotary shaft of the motor, thus performing the highly accurate measurement.COPYRIGHT: (C)2016,JPO&INPIT【課題】被測定物の内周面または深穴内径に、プローブを進入させ内面で反射させた光線を立体的に取り込んで観察、及び精度を測定するための光学式内面測定装置において、より高精度な測定を可能にする。【解決手段】チューブに内蔵された光ファイバーと、この光ファイバーの先端側に配置された光路変換手段と、この光路変換手段を回転駆動させるモータとを備える構造において、モータの回転軸部の振れ量を測定する手段を有する。被検査物からの反射光をコンピュータで計算して得た被検査物の内周面の形状データを、変位測定手段の変位量データで補正することで、モータの回転軸の振れや回転振動が与える測定誤差を解消し、高精度な測定が行える。【選択図】 図12
