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Piezoelectric element, piezoelectric actuator, and electronic apparatus
专利权人:
キヤノン株式会社
发明人:
松田 堅義,久保田 純,三浦 薫
申请号:
JP2016229393
公开号:
JP6768469B2
申请日:
2016.11.25
申请国别(地区):
JP
年份:
2020
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide a lead-free piezoelectric element having good and stable piezoelectric characteristics in the piezoelectric element category temperature range.SOLUTION: In a piezoelectric element provided with a substrate, a first electrode, a piezoelectric film, and a second electrode, the piezoelectric film contains titanate zirconate barium, manganese, and bismuth charge disproportionated to trivalent and pentavalent. The mole ratio x of zirconium to the sum of zirconium and titanium is 0.02≤x≤0.13, the content of manganese is 0.002-0.015 mole for 1 mole of the titanate zirconate barium, and the content of bismuth is 0.00042-0.00850 mole for 1 mole of the metal oxide.SELECTED DRAWING: Figure 1
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/
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