The plasma is formed inside the long shaku condition narrow tube with electrodeless discharge, the plasma production device in order to do the plasma processing inside the long shaku condition narrow tube and that method is offered are designated as purpose. Long shaku condition narrow tube 9 it is accommodation possible and also, internal pressure when adjustment possible container the magnetic field impression expedient it possesses with the microwave supply expedient 2 which microwave incidence is done inside 8 where impresses the magnetic field at least in portion of 1 and the said long shaku condition narrow tube and the said container, adjusts pressure inside the said long shaku condition narrow tube, the specified pressure which is higher than pressure inside the said container, at the same time impresses the magnetic field at least in portion of the said long shaku condition narrow tube, by incidence doing microwave inside said container, inside the said long shaku condition narrow tube the plasmaIt is the plasma production device which features that it forms.長尺状細管内で無電極放電によりプラズマを生成し、長尺状細管内部のプラズマ処理を行うためのプラズマ生成装置及び方法を提供することを目的とする。 長尺状細管9を収容可能であると共に、内部圧力を調整可能な容器1と、該長尺状細管の少なくとも一部に磁界を印加する磁界印加手段8と、該容器内にマイクロ波を入射するマイクロ波供給手段2とを有し、該長尺状細管の内部の圧力を、該容器内の圧力より高い所定の圧力に調整し、かつ該長尺状細管の少なくとも一部に磁界を印加した状態で、該容器内にマイクロ波を入射することにより、該長尺状細管内にプラズマを生成することを特徴とするプラズマ生成装置である。
