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2DEG-BASED SENSOR AND DEVICE FOR ECG SENSING
专利权人:
发明人:
Roman Vitushinsky,Peter Offermans
申请号:
US14265088
公开号:
US20140323895A1
申请日:
2014.04.29
申请国别(地区):
US
年份:
2014
代理人:
摘要:
The disclosed technology generally relates to sensors comprising a two-dimensional electron gas (2DEG), and more particularly to an AlGaN/GaN 2DEG-based sensor for sensing signals associated with electrocardiograms, and methods of using the same. In one aspect, a sensor comprises a substrate and a GaN/AlGaN hetero-junction structure formed on the substrate and configured to form a two-dimensional electron gas (2DEG) channel within the GaN/AlGaN hetero-junction structure. The sensor additionally comprises Ohmic contacts connected to electrical metallizations and to the 2DEG channel, wherein the GaN/AlGaN hetero-junction structure has a recess formed between the Ohmic contacts. The sensor further comprises a dielectric layer formed on a top surface of the sensor.
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