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SCHNELLES SCANNING EINES ZIELGEBIETS
专利权人:
GSI Helmholtzzentrum für Schwerionenforschung GmbH
发明人:
BERT, Christoph,HABERER, Thomas,RIETZEL, Eike
申请号:
EP09778501.8
公开号:
EP2326389B1
申请日:
2009.09.12
申请国别(地区):
EP
年份:
2017
代理人:
摘要:
The invention concerns a method for irradiating a target with a beam approaching target points, involving the following steps: Measuring at least one of the parameters relating to the position of the beam and the intensity of the beam, changing the beam as a function of the at least one measured parameter, particularly as a function of a variance relating to the at least one measured parameter. The method is characterized in that the at least one measured parameter is measured at the most once per target point. Furthermore, the invention concerns a device for irradiating a target in accordance with the invention-based method and a control system for controlling such a device.
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