Heinrich Johannes Seiwert,Christiane Le Tiec,Ulrich Alfred Brammer
申请号：
US16553033
公开号：
US20200071208A1
申请日:
2019.08.27
申请国别(地区):
US
年份:
2020
代理人:
摘要：
The present application discloses a ozonated water delivery system which includes at least one contacting device in communication with at least one ultrapure water source configured to provide ultrapure water, at least one ultrapure water conduit coupled to the ultrapure water source, at least one solution in communication with the contacting device and the ultrapure water source via the ultrapure water conduit, one or more gas sources containing at least one gas in communication with at least one of the ultrapure water source, the ultrapure water conduit, and the solution conduit, at least one mixed gas conduit in communication with the at gas source and the contacting device and configured to provide at least one mixed gas to the contacting device, and at least one ozonated water output conduit may be in communication with the contacting device.
