Comprises a reservoir 102a for storing a chemical liquid, and an opening provided in the top surface 102u of the reservoir 102a, the recess 103 formed in the side 102as, and a protrusion 110 formed on the side face 102as, convex is formed to be inclined to the top surface 102u side toward the top 110c of the projections 110, recesses 103 and protrusions 110 in a side 102as, than C1, C2 central axis, 110s surface of the bottom side of the part 110 is a side It is located to be shifted to the side of the other side 102ar to be continuous with 102as.薬液を貯留する貯留部102aと、貯留部102aの天面102uに設けられた開口部と、側面102asに形成された凹部103と、側面102asに形成された凸部110と、を具備し、凸部110の底面側の110s面は、凸部110の頂部110cに向かって天面102u側に傾いて形成され、凸部110及び凹部103は、側面102asにおいて、中心軸C1、C2よりも、側面102asと連続する他の側面102ar側にずれて位置している。
