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Scanning trajectories for region-of-interest tomography
专利权人:
FEI Company
发明人:
MYERS, Glenn R.,LATHAM, Shane J.,SHEPPARD, Adrian P.,KINGSTON, Andrew M.,DELGADO-FRIEDRICHS, Olaf
申请号:
AU2019202046
公开号:
AU2019202046A1
申请日:
2019.03.25
申请国别(地区):
AU
年份:
2019
代理人:
摘要:
#$%^&*AU2019202046A120191107.pdf#####Scanning Trajectories for Region-Of-Interest Tomography ABSTRACT OF THE DISCLOSURE Apparatuses and methods for implementing scanning trajectories for ROI tomography are disclosed herein. An example method includes determining a first focus object distance based on a circumradius of a sample, the sample including a region of interest, determining a second focus object distance based on a radius of a smallest cylinder that contains the region of interest, determining a plurality of viewing angles from a plurality of possible viewing angles in response to the first focus object distance, where each viewing angle of the plurality of viewing angles has an associated focus object distance measured from the region of interest, and where the associated focus object distance of each of the plurality of viewing angles is less than the first focus object distance and greater than the second focus object distance, and scanning the region of interest using at least the plurality of viewing angles. P0006854AU_22405720_1
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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