Richard Comunale,Alexander Groholski,John A. Notte, IV,Randall Percival,Billy W. Ward
申请号：
US12997371
公开号：
US08461557B2
申请日:
2008.06.13
申请国别(地区):
US
年份:
2013
代理人:
摘要：
Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).
