Anna SAHLHOLM,Olof SVENONIUS,Daniel NILSSON,David RIHTNESBERG
申请号：
US16627483
公开号：
US20200155099A1
申请日:
2018.06.04
申请国别(地区):
US
年份:
2020
代理人:
摘要：
There is provided a method and system for filling micromechanical structures with x-ray absorbing material. The method includes providing a wetting layer for enabling melted x-ray absorbing material to flow over the surface of an overall structure including the micromechanical structures, melting the x-ray absorbing material, and applying gas pressure to press the melted x-ray absorbing material into the micromechanical structures.
