The present invention provides a measurement method, a measurement device, and a program, whereby the capacity for a chemical agent can be measured highly accurately and non-destructively, for each needle-shaped recess in a mold. Ideally, this measurement method obtains a reference surface height being the height between: a first surface of a mold on the side that a chemical agent is filled or a predetermined reference surface for a second surface on the opposite side to the first surface； and the second surface. A first detection result is obtained, being the result from detection of a measurement wave for each needle-shaped recess, said measurement wave being emitted from a chemical agent surface being the surface of the chemical agent, said emission being in accordance with the incidence of the measurement wave to the chemical agent inside the needle-shaped recesses. A first height between the reference surface and the chemical agent surface is detected for each needle-shaped recess, on the basis of the first detection result. A second height from the second surface to the chemical agent surface is detected for each needle-shaped recess, from both the reference surface height and the first height for each needle-shaped recess. The chemical agent capacity inside the needle-shaped recesses is calculated for each needle-shaped recess, on the basis of the second height for each needle-shaped recess and on the basis of a known needle-shaped recess shape.La présente invention concerne un procédé de mesure, un dispositif de mesure, et un programme, grâce à quoi la capacité pour un agent chimique peut être mesurée très précisément et de manière non destructrice, pour chaque évidement en forme d'aiguille dans un moule. Idéalement, le présent procédé de mesure obtient une hauteur de surface de référence correspondant à la hauteur entre : une première surface d'un moule sur le côté qu'un agent chimique remplit ou une surface de référence prédéfinie pour une seconde surface
