PROBLEM TO BE SOLVED: To prevent a shadow caused by a defect or an irregularity from appearing even if the defect or the irregularity occurs in, for example, a thin film electrode, a positive-hole injection inhibition layer, or the like.SOLUTION: This invention provides an X-ray sensor including: an X-ray transparent base 17 whose lower side serves as an X-ray incident surface and a thin film electrode 18, a positive-hole injection inhibition layer 19, an optical conversion layer 20, and an electron injection inhibition layer 21, which are sequentially provided on the upper surface side of the X-ray transparent base 17. In the X-ray sensor a recess 32 is formed that penetrates the thin film electrode 18 and the positive-hole injection inhibition layer 19 to reach the upper surface of the X-ray transparent base 17.COPYRIGHT: (C)2013,JPO&INPIT【課題】本発明は、例えば、薄膜状電極、正孔注入阻止層などにキズや、ムラが発生した場合でも、それによる陰の出現が起きないようにすることを目的とするものである。【解決手段】そしてこの目的を達成するために本発明は、下方側がX線入射面となったX線透過性基板17と、このX線透過性基板17の上面側の上方に順次設けた薄膜状電極18、正孔注入阻止層19、光変換膜層20、電子注入阻止層21とを備え、前記正孔注入阻止層19および薄膜状電極18を貫通し、前記X線透過性基板の上面に達する凹部32を形成。【選択図】図7
