X線分解能評価用ファントム
- 专利权人:
- 独立行政法人産業技術総合研究所
- 发明人:
- 三澤 雅樹,林 和彦,福井 郁生,松本 壮平
- 申请号：
- JP2008332159
- 公开号：
- JP5004100B2
- 申请日:
- 2008.12.26
- 申请国别(地区):
- JP
- 年份:
- 2012
- 代理人:
- 摘要：
PROBLEM TO BE SOLVED: To provide a phantom for evaluating an X-ray resolution which simultaneously evaluates a spatial resolution and a contrast resolution for a high-resolution micro focus X-ray inspection system.
SOLUTION: The phantom for evaluating the X-ray resolution includes: a substrate 4 and a plurality of blocks 3 provided on the substrate. The block 3 includes a photosensitive resin, and has a fixed height in the direction perpendicular to the substrate 4. A main block 3a and a sub block 3b are alternately and successively disposed on the substrate in one direction so as to be parallel. The block 3 has an X-ray entering end face 3A, and an X-ray exiting end face 3B. The quantity of X rays entering the X-ray entering end face 3A and exiting from the X-ray exiting end face 3B is different in all main blocks 3a and sub blocks 3b.
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- 来源网站：
- 中国工程科技知识中心
