Jae-Hwan Oh,Jae-Beom Choi,Won-Kyu Lee,Young-Jin Chang,Seong-Hyun Jin
申请号：
US13272114
公开号：
US20120107984A1
申请日:
2011.10.12
申请国别(地区):
US
年份:
2012
代理人:
摘要：
A laser crystallization system and a method of manufacturing a display apparatus using the laser crystallization system are disclosed. In one embodiment, the system includes i) a mother substrate in which first, second, and third display regions and ii) a stage for supporting the mother substrate and moving in first and second directions perpendicular to each other. The embodiment also includes i) a first laser irradiation unit for irradiating a first laser beam having a width greater than or identical to a width of a side of one of the first, second, and third display regions in the first direction and ii) a second laser irradiation unit spaced apart from the first laser irradiation unit and irradiating a second laser beam having a width greater than or identical to the width of the one side in the first direction.
