METHOD AND APPARATUS FOR IMAGING THREE-DIMENSIONAL STRUCTURE
- 专利权人:
- 发明人:
- Noam Babayoff,Isaia Glaser-Inbari
- 申请号：
- US15468812
- 公开号：
- US20170196664A1
- 申请日:
- 2017.03.24
- 申请国别(地区):
- US
- 年份:
- 2017
- 代理人:
- 摘要：
- An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probe, a light emitter, focusing optics, a detector, and a processor.
- 来源网站：
- 中国工程科技知识中心
