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ULTRASOUND TRANSDUCER ARRAY, PROBE AND SYSTEM
专利权人:
KONINKLIJKE PHILIPS N.V.
发明人:
HANS-PETER LOEBL,ALFONS WOUTER GROENLAND
申请号:
US15770605
公开号:
US20180310916A1
申请日:
2016.11.02
申请国别(地区):
US
年份:
2018
代理人:
摘要:
An ultrasound transducer array is provided that comprises a plurality of CMUT (capacitive micromachined ultrasound transducer) cells (100), each CMUT cell comprising a substrate (300) carrying a first electrode (110) of a first electrode arrangement, the substrate being spatially separated from a flexible membrane including a second electrode (120) of a second electrode arrangement by a gap (130), at least one of the first electrode and the second electrode being electrically insulated from said gap by at least one dielectric layer (311, 313), wherein at least one of the first electrode arrangement and the second electrode arrangement is partitioned into a plurality of sections interconnected by respective fuse portions (112, 122). An ultrasound probe and an ultrasound system comprising such an ultrasound transducer array are also disclosed.
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