Combined ion irradiation and ion radiography device

• 收藏
• 分享

专利权人:

发明人:

申请号：

EP11192198.7

公开号：

EP2602003B1

申请日:

2011.12.06

申请国别(地区):

EP

年份:

2014

代理人:

摘要：

The invention relates to an irradiation arrangement (1, 3) for irradiating a workpiece (12) with a particle beam (10). The irradiation arrangement (1, 3) comprises a particle beam supply device (2, 9), a workpiece accommodation device (13) and a position-sensitive particle monitoring device (14), characterised in that the position-sensitive particle monitoring device (14) is arranged on the distal side of the workpiece accommodation device (13), when seen from the particle beam supply device (2, 9).

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/