A sterilized-liquefied gas production apparatus, includes: a liquefied gas reservoir； a source-gas supplier configured to supply a source gas to the liquefied gas reservoir； a cooler configured to cool down an inside of the liquefied gas reservoir and thereby liquefy the source gas； a supply pipe connecting the source-gas supplier and the liquefied gas reservoir； a sterilization filter provided in the supply pipe； a sterilizer configured to heat and sterilize a sterilization region by high-temperature saturated water vapor, the sterilization region being located close to a downstream portion than the sterilization filter； and a dryer configured to remove moisture generated by the heating and sterilization and dry the sterilization region.本發明之無菌液化氣體製造裝置包含：液化氣體貯存罐；原料氣體供給裝置，其對上述液化氣體貯存罐供給原料氣體；冷卻裝置，其將上述液化氣體貯存罐內冷卻並使上述原料氣體液化；供給配管，其將上述原料氣體供給裝置與上述液化氣體貯存罐連接；滅菌過濾器，其係設置於上述供給配管；滅菌裝置，其藉由高溫飽和水蒸氣而將位於較上述滅菌過濾器更靠下游部分之滅菌區域進行加熱滅菌；及乾燥裝置，其將因上述加熱滅菌所產生之水分去除而使上述滅菌區域乾燥。
