PROBLEM TO BE SOLVED: To provide an ultraviolet sterilizer for highly accurately detecting a damage to an ultraviolet transmission plate such as quartz glass.SOLUTION: The ultraviolet sterilizer includes: an ultraviolet lamp 11 a housing 12 for enclosing the ultraviolet lamp 11 an ultraviolet transmission part 13 arranged in the housing 12 and constituted by forming a sealed space 19 between opposing ultraviolet transmission plates 16, 17 an air supply means for introducing air at prescribed pressure to the sealed space 19 of the ultraviolet transmission part 13 so as to hold a positive pressure state in the sealed space 19 of the ultraviolet transmission part 13 and a flow sensor arranged between the sealed space 19 of the ultraviolet transmission part 13 and the air supply means so as to detect an air flow.COPYRIGHT: (C)2012,JPO&INPIT【課題】石英ガラス等の紫外線透過板の破損を高い精度で検出することができる紫外線殺菌装置を提供すること。【解決手段】紫外線ランプ11と、紫外線ランプ11を包囲するハウジング12と、ハウジング12に設けられた、対向する紫外線透過板16,17の間に密閉空間19を形成して構成された紫外線透過部13と、紫外線透過部13の密閉空間19に所定圧のエアーを導入して紫外線透過部13の密閉空間19を陽圧状態に保持するエアー供給手段と紫外線透過部13の密閉空間19及びエアー供給手段の間に設けられた、エアーの流れを検出するフローセンサとを備えた紫外線殺菌装置である。【選択図】図1
