A delivery device for administering an active substance to a subject transdermally includes a first plate member having a plurality of first chambers formed therein. Solid form structures including the active substance and of conical shape having a pointed skin penetrating tip are located in the first chambers. A second plate member having a plurality of second chambers including a driving substance is secured to the first plate member with a first membrane of an expandable material sealably located between the respective first and second plate members. Expansion of the driving substance in the second chambers urges the first membrane into the corresponding first chambers for in turn urging the solid form structures to penetrate through a second membrane into the skin of the subject. A third plate member includes a plurality of electrically powered heating elements aligned with the second chambers for heating and expanding the driving substance.
