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共焦点光学式検査装置および共焦点光学式検査方法
专利权人:
三星電子株式会社Samsung Electronics Co.,Ltd.
发明人:
富樫 光宏,上山 真司,沼田 光徳
申请号:
JP20120265692
公开号:
JP6131448(B2)
申请日:
2012.12.04
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide a confocal optical inspection device capable of acquiring information on an object with higher precision while taking distortion of an optical transmission line into consideration.SOLUTION: A confocal optical inspection device inspects an object by acquiring a confocal image of the object, and includes: a light source which emits illumination light; a first opening member which has a plurality of openings for making the illumination light emitted from the light source into a plurality of pieces of illumination light; an imaging part which acquires an image as respective pieces of illumination light reflected by the object form the image; and an information processing part which acquires a corrected confocal image by removing optical transmission distortion of the confocal optical inspection device from a TDI image obtained through a TDI operation of the imaging part by using a PSF representing previously measured optical characteristics of the confocal optical inspection devic
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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