The objective is to obtain a particle beam irradiation apparatus in which an irradiation position relevant value related to the irradiation position of a charged particle beam and an irradiation position relevant value error can be displayed in such a way that the irradiation position relevant value and the irradiation position relevant value error correspond to each other. There is provided a data processing apparatus (19) that displays on a display unit (43) a measured irradiation position relevant value and an irradiation position relevant value error, which is the error of the measured irradiation position relevant value related to the irradiation position of charged particle beam (1) with respect to a desired irradiation position relevant value related to a desired irradiation position, in such a way that the measured irradiation position relevant value and the irradiation position relevant value error correspond to each other and the data processing apparatus (19) has a calculation unit (42) that displays a desired value display figure (23) indicating a desired irradiation position relevant value at the coordinates of the desired irradiation position relevant value and a measured value display figure (24) at display coordinates, which are coordinates obtained by adding the desired irradiation position relevant value to the coordinates acquired by arithmetically operating an irradiation position relevant value error with deformation coefficients, and that displays a line (25) that connects the measured value display figure (24) with the desired value display figure (23).本發明之目的在獲得能夠讓與帶電粒子束的照射位置相關聯之照射位置關聯值和照射位置關聯值誤差相對應地顯示出來之粒子束照射裝置。本發明之粒子束照射裝置具備有:讓與帶電粒子束(1)的照射位置相關聯之實際照射位置關聯值相對於與目標照射位置相關聯之目標照射位置關聯值的誤差,亦即照射位置關聯值誤差、和實際照射位置關聯值相對應地顯示於顯示部(43)之資料處理裝置(19),資料處理裝置(19)具有:讓表示目標照射位置關聯值之目標值顯示圖形(23)顯示於目標照射位置關聯值的座標、及讓表示實際照射位置關聯值之測定值顯示圖形(24)顯示於先利用變形係數將照射位置關聯值誤差演算成座標再將此座標加上目標照射位置關聯值而得到的座標,亦即顯示座標,並且顯示連結測定值顯示圖形(24)與目標值顯示圖形(23)之線段(25)之演算部(42)。1...帶電粒子束2...照射機器部3...控制管理部10...X方向掃描電磁鐵1
