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APPAREIL DIRRADIATION PAR FAISCEAU DE PARTICULES, APPAREIL DE TRAITEMENT PAR FAISCEAU DE PARTICULES ET PROGRAMME DAFFICHAGE DE DONNÉES
专利权人:
Mitsubishi Electric Corporation
发明人:
IWATA Takaaki,岩田高明,HOKODATE Toshiyuki,鉾館俊之
申请号:
JPJP2010/073373
公开号:
WO2012/086062A1
申请日:
2010.12.24
申请国别(地区):
WO
年份:
2012
代理人:
摘要:
The purpose of the invention is to obtain a particle beam irradiation apparatus capable of mapping an irradiation position-related value, which is associated with the irradiation position of a charged particle beam, and an irradiation position-related value error to each other and displaying same. A data processing device (19) is provided, which maps an irradiation position-related value error and an actual irradiation position-related value to each other and displays same on a display unit (43). The irradiation position-related value error is the deviation of an actual irradiation position-related value associated with the irradiation position of a charged particle beam (1) from a target irradiation position-related value associated with a target irradiation position. The data processing device (19) has an operation part (42): which displays a graphic target value symbol (23) representing a target irradiation position-related value on the coordinates for the target irradiation position-related value, and a graphic measured value symbol (24) representing an actual irradiation position-related value on display coordinates, which are coordinates resulting from adding the target irradiation position-related value to the coordinates resulting from operating on the irradiation position-related value error with a deformation coefficient and which displays a line segment (25) that connects the graphic measured value symbol (24) with the graphic target value symbol (23).La présente invention concerne lobtention dun appareil dirradiation par faisceau de particules capable de mapper une valeur liée à une position dirradiation, qui est associée à la position dirradiation dun faisceau de particules chargées, et une erreur de valeur liée à une position dirradiation lune à lautre et de les afficher. La présente invention concerne en outre un dispositif de traitement des données (19), qui mappe une erreur de valeur liée à une position dirradiation et une véritable valeur liée à un
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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