Raymond P. Boisseau,John S. Gordon,Andrew Dart,Julia C. Nett
申请号：
US15250012
公开号：
US09901751B1
申请日:
2016.08.29
申请国别(地区):
US
年份:
2018
代理人:
摘要：
A multi-layer charged particle beam characterization system is disclosed, and method for using the same. A typical embodiment includes a plurality of two-sided metal plates, arranged as a stack, each metal plate having an electrical contact tab extending from at least one common edge of the metal plate, and a plurality of insulator films disposed between adjacent metal plates, each insulator film sized to match its corresponding metal plate. The tabs are coupled to a printed circuit board and connected to an external electrical connector to register a number of metal plates and insulator layers through which a charged particle beam has penetrated.
