Joachim P. Spatz,Claudia Pacholski,Tobias Schoen,Lindarti Purwaningsih,Tobias Wolfram
申请号：
US13703054
公开号：
US20130236881A1
申请日:
2011.05.30
申请国别(地区):
US
年份:
2013
代理人:
摘要：
The invention relates to a method for producing column-shaped or conical nanostructures, wherein the substrate surface is covered with an arrangement of metal nanoparticles and etched, the nanoparticles acting as an etching mask and the etching parameters being set such that column structures or cone structures are created below the nanoparticles and the nanoparticles are preserved as a structural coating.
