The Board of Trustees of the Leland Stanford Junior University
发明人:
Amin Nikoozadeh,Butrus T. Khuri-Yakub
申请号:
US14300033
公开号:
US09678591B2
申请日:
2014.06.09
申请国别(地区):
US
年份:
2017
代理人:
摘要:
Aspects of the present disclosure are directed towards methods, systems, and apparatuses that include a pressure-sensor arrangement including a plate structure and a plurality or array of pressure-sensor cells. Additionally, the methods, systems, and apparatuses include integrated circuitry communicatively coupled to the pressure-sensor arrangement that senses pressure changes exhibited by changes in capacitance or vibrational characteristics.