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Optical rotary probe
专利权人:
Soh Ohzawa
发明人:
Soh Ohzawa
申请号:
US13125176
公开号:
US08602975B2
申请日:
2009.09.10
申请国别(地区):
US
年份:
2013
代理人:
摘要:
There is disclosed a probe (50) for directing light to an object to be measured and receiving light returned from the object to be measured, the probe including: an optical path (21) for transmitting light from a light source (10) a mirror member (52) for reflecting the light transmitted through the optical path (21) and a rotational oscillation mechanism (56) for rotatably oscillating the mirror member (52) and a tip end portion of the optical path (21) about a longitudinal axis of the optical path (21) wherein the rotational oscillation mechanism (56) is adapted to perform the rotational oscillation within a range defined by a torsional elasticity limit of the optical path (21). This configuration can provide an optical rotary probe with a simple structure and with high reliability, which is capable of suppressing optical losses and reflection ghosts.
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