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Laser ablation method and apparatus having a feedback loop and control unit
专利权人:
Peter Delfyett
发明人:
Peter Delfyett,Richard Stoltz
申请号:
US11224867
公开号:
US09022037B2
申请日:
2005.09.12
申请国别(地区):
US
年份:
2015
代理人:
摘要:
A laser ablation method and apparatus uses a laser device to generate a pulsed laser using a laser device and to project the pulsed laser onto an ablation target to be ablated. A probe is then used to measure an indicative property of the ablation target or of the pulsed laser projected on the ablation target. A control loop is used to optimize ablation effect by generating a feedback signal according to the measured indicative property, sending the feedback signal to a control unit, and adjusting an output parameter of the pulsed laser according to the feedback signal. The measured indicative property may be a size of the laser beam spot or a material composition. The ablation, the feedback and the adjustment may be performed dynamically.
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