To provide an ultrasonic device, ultrasonic probe, and ultrasonic device having high transmission / reception accuracy.A supporting film having a first surface facing the opening and a second surface which is a rear surface of the first surface, the supporting film closing one end side of the opening A piezoelectric element disposed on the second surface side of the support film and disposed so as to overlap with the opening in a plan view seen from a film thickness direction of the support film And a sealing plate bonded to the second surface of the supporting film, wherein the sealing plate has an uneven portion on a surface of the sealing plate opposite to the supporting film Sonic device.(FIG.【課題】高い送受信精度を有する超音波デバイス、超音波探触子、及び超音波装置を提供すること。【解決手段】開口部を有する基板と、前記開口部の一端側を閉塞し、前記開口部に臨む第一面及び前記第一面の裏面である第二面を有する支持膜と、前記支持膜に設けられ、前記支持膜の膜厚方向から見た平面視において、前記開口部と重なって配置される圧電素子と、前記支持膜の前記第二面側に配置され、梁部を介して前記支持膜の前記第二面に接合される封止板と、を備え、前記封止板は、当該封止板の前記支持膜とは反対側の面に凹凸部を有することを特徴とする超音波デバイス。【選択図】図5
