#$%^&*AU2015275267B220170921.pdf#####ABSTRACT A fabrication method for a flexible device having an array of pixel units (417) for retina prosthesis, comprising: forming layered structures (407) including the array of pixel units over a silicon substrate (501), each pixel unit comprising a processing circuitry, a micro electrode (5103) and a photo sensor (101), wherein the plurality of micro electrodes are formed on the silicon substrate； forming a first set of biocompatible layers over the layered structures； thinning down the silicon substrate to a controlled thickness of the silicon substrate to allow bending of the substrate to about a curvature of a retina； and forming a second set of biocompatible layers over the thinned silicon substrate, the second set of biocompatible layers in contact with the first set of biocompatible layers around the structure to form a sealing biocompatible layers wrapping the device to allow the device in long-term contact with retina tissues, wherein top surfaces of the micro electrodes of the pixel units are exposed through the biocompatible layers. P074675D2/10840076
