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TREATMENT GAS SUPPLYING APPARATUS
专利权人:
发明人:
申请号:
EP16733717.9
公开号:
EP3313492A1
申请日:
2016.06.16
申请国别(地区):
EP
年份:
2018
代理人:
摘要:
A treatment gas supplying apparatus includes: a first mixed gas producing section that is configured to produce a first mixed gas in which a first gas and a treatment gas having a treatment effect are mixed with each other in a first ratio and a second mixed gas producing section that is configured to produce a second mixed gas in which a second gas and the treatment gas are mixed with each other in a second ratio, the second ratio being within a constant difference from the first ratio.
来源网站:
中国工程科技知识中心
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http://www.ckcest.cn/home/

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