您的位置: 首页 > 农业专利 > 详情页

シード印刷及びめっきによるコンタクト金属及び相互接続金属の印刷
专利权人:
シン フィルム エレクトロニクス エーエスエー
发明人:
チャンドラ, アディティ,カマス, アーヴィンド,クリーヴス, ジェイムス, モンターグ,ロッケンバーガー, ジョーグ,高島 真穂
申请号:
JP20140079578
公开号:
JP6073829(B2)
申请日:
2014.04.08
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
Methods of forming contacts (and optionally, local interconnects) using an ink comprising a silicide-forming metal, electrical devices such as diodes and/or transistors including such contacts and (optional) local interconnects, and methods for forming such devices are disclosed. The method of forming contacts includes depositing an ink of a silicide-forming metal onto an exposed silicon surface, drying the ink to form a silicide-forming metal precursor, and heating the silicide-forming metal precursor and the silicon surface to form a metal silicide contact. Optionally, the metal precursor ink may be selectively deposited onto a dielectric layer adjacent to the exposed silicon surface to form a metal-containing interconnect. Furthermore, one or more bulk conductive metal(s) may be deposited on remaining metal precursor ink and/or the dielectric layer. Electrical devices, such as diodes and transistors may be made using such printed contact and/or local interconnects. A metal ink may be printed for contacts a
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

意 见 箱

匿名:登录

个人用户登录

找回密码

第三方账号登录

忘记密码

个人用户注册

必须为有效邮箱
6~16位数字与字母组合
6~16位数字与字母组合
请输入正确的手机号码

信息补充