The rotary valve which possesses the slide member in order to supply the processing gas which includes vapor to plural processing processes is offered. The slide member which possesses the sliding aspect to which the passage (8,9,10) opens and at the same time slides mutually (1,2 4,6) the aforementioned passage (8,9,10) to be the rotary valve which has the mechanical seal mechanism which is changed by having, while sealing the fluid by the fact that it applies pressure it slides the sliding aspect, the said slide member (1,2 4,6) the hydrophobic component where sliding surface side differs hardness (2 and 4) it is the rotary valve which features that it consists of.水蒸気を含む処理ガスを複数の処理工程へ供給するための摺動部材を具備する回転バルブを提供する。流路(8,9,10)が開口し且つ互いに摺動する摺動面を有する摺動部材(1,2;4,6)を備え、摺動面を与圧することで流体をシールしながら摺動することにより前記流路(8,9,10)を切り替えるメカニカルシール機構を備えた回転バルブであり、該摺動部材(1,2;4,6)の摺動面側が硬度の異なる疎水性部材(2、4)からなることを特徴とする回転バルブである。
