Dan HASHIMSHONY,Orit YARDEN,Gal AHARONOWITZ,Gil COHEN
申请号：
US15665829
公开号：
US20180055404A1
申请日:
2017.08.01
申请国别(地区):
US
年份:
2018
代理人:
摘要：
A graphical user interface (GUI) including: (a) a group definition module adapted to accept a user input defining groups； (b) a data receiver operable to receive a plurality of individual measurement input datum indicative of status of a substrate； (c) a grouping module configured to assign each of said individual measurement input datum to one of said groups to produce grouped data； and (d) an output module adapted to output the grouped data.
