Nandish Desai;Faye Hendley Elgart;W. Davis Lee;Mark R. Amato;Nick Ruebel
发明人:
Faye Hendley Elgart,Nick Ruebel,Mark R. Amato,Nandish Desai,W. Davis Lee
申请号：
US15838072
公开号：
US20180099156A1
申请日:
2017.12.11
申请国别(地区):
US
年份:
2018
代理人:
摘要：
The invention comprises a method and apparatus for steering/scanning charged particles, comprising: a double dipole scanning system, comprising: (1) a beam path chamber comprising an entrance side and an exit side, the entrance side comprising a smaller area than the exit side； (2) a first dipole magnet, the first dipole magnet comprising a first coil and a third coil on first opposite sides of the beam path chamber； and (3) a second dipole magnet, the second dipole magnet comprising a second coil and a fourth coil on second opposite sides of the beam path chamber, the beam path chamber further comprising a truncated square/rectangle pyramid shape, the smaller entrance side of the charged particles comprising a top of the truncated pyramid shape, the exit side of the charged particles comprising a larger bottom of the truncated pyramid shape.
