PROBLEM TO BE SOLVED: To provide a sterilization system for sterilizing a target treatment chamber, which reduces the amount of hydrogen peroxide to be used and to prevent temporal deterioration of components or the like of the sterilization system, while keeping the sterilization effect of the treatment chamber.SOLUTION: The sterilization system includes: an air circulation mechanism (10) which contains a circulation flow channel (11) for connecting an exhaust port (2a) and an air supply port (2b) of the treatment chamber (2) to circulate the air in the treatment chamber (2) a plasma discharge part (21) arranged in the circulation flow channel (11) and performing plasma discharge to generate active species for decomposing bacteria in the air and a hydrogen peroxide supply part (30) for supplying hydrogen peroxide to the circulation flow channel (11).COPYRIGHT: (C)2012,JPO&INPIT【課題】滅菌対象となる処理室を滅菌する滅菌システムにおいて、処理室の滅菌効果を維持しつつ、過酸化水素の使用量を低減し且つ滅菌システムの構成部品等の経時劣化を抑制する。【解決手段】処理室(2)の排気口(2a)と給気口(2b)とを繋ぐ循環流路(11)を含み処理室(2)内の空気を循環させる空気循環機構(10)と、循環流路(11)に配置されプラズマ放電を行うことにより空気中の菌を分解する活性種を生成するプラズマ放電部(21)と、循環流路(11)へ過酸化水素を供給する過酸化水素供給部(30)と、を備える滅菌システムを構成する。【選択図】図1
